NachhaltigAngewandte Naturwissenschaften und WirtschaftsingenieurwesenIPH TeisnachBeitrag (Sammelband oder Tagungsband)
Christian J. Trum, Sebastian Sitzberger, Rolf Rascher
Improved performance of CMP processes through targeted adjustment of polishing slurry and polish pad
Proceedings of SPIE Optical Engineering + Applications (19-23 August, 2018; Optical Manufacturing and Testing XII; San Diego, CA, USA), San Diego, United States, vol. 10742
2018
ISBN: 978-1-5106-2055-1
DOI: 10.1117/12.2321031
Abstract anzeigen
Chemical-mechanical polishing (CMP) of optical glasses is widespread and forms the basis for many high-precision polishing processes. The pads, slurries and glass materials used in polishing have many different properties. The effects of these properties on the process results are often unknown. The right choice and combination is therefore often a challenge.
By means of a plan processing of N-BK7 and SF56 samples by a plan-polishing process, the influence on the process results, material removal rate (MRR), micro roughness and cleanliness caused by slurry and polishing pad is shown. It turns out that the type of polish pad has the biggest impact on the results. The easy-to-process material N-BK7 shows only little influence by the type of slurry used. The more challenging SF56, however, shows significant effects, especially in the area of the resulting micro roughness and the appearance of surface damages like orange peel. Especially the use of Auerpol® PZ500 shows clear advantages here.
For a selection of three out of nine polishing pads, the effect of density variation of the slurry was also investigated. Lower particle concentrations lead to lower material removal rates. This applies to both materials. The more sensitive SF56 shows a reduction in micro roughness by the use of a less dense slurry.
The correct selection of the polishing pad has a positive effect on the material removal rate and/or the micro roughness in all tested materials. An adaptation of the type and concentration of the slurry is especially important for more sensitive materials and in combination with the right polishing pad.
In view of the development towards special materials and small lot sizes, the targeted and correct selection of polishing slurries and pads becomes more and more important. The information required for this purpose on the behavior of the pads and slurries available on the market must therefore first be determined in a targeted manner and clearly presented.
NachhaltigAngewandte Naturwissenschaften und WirtschaftsingenieurwesenIPH TeisnachBeitrag (Sammelband oder Tagungsband)
O. Fähnle, M. Doetz, O. Dambon, F. Klocke, Christian Vogt, Rolf Rascher
Ductile mode single point diamond turning (SPDT) of binderless tungsten carbide molds
Proceedings of SPIE Optical Engineering + Applications (19-23 August, 2018; Optical Manufacturing and Testing XII; San Diego, CA, USA), San Diego, United States, vol. 10742
2018
ISBN: 978-1-5106-2055-1
DOI: 10.1117/12.2323244
NachhaltigAngewandte Naturwissenschaften und WirtschaftsingenieurwesenIPH TeisnachBeitrag (Sammelband oder Tagungsband)
O. Fähnle, Christian Vogt, Rolf Rascher, M. Doetz, O. Dambon, F. Klocke
From turning to grinding: ductile machining with gPVA
Proceedings of SPIE Optical Engineering + Applications (19-23 August, 2018; Optical Manufacturing and Testing XII; San Diego, CA, USA), San Diego, United States, vol. 10742
2018
ISBN: 978-1-5106-2055-1
DOI: 10.1117/12.2323246
NachhaltigAngewandte Naturwissenschaften und WirtschaftsingenieurwesenIPH TeisnachBeitrag (Sammelband oder Tagungsband)
O. Fähnle, Christian Vogt, Rolf Rascher, M. Doetz, O. Dambon, F. Klocke
Ductile grinding of tungsten carbide molds applying standard CNC machines
Proceedings of SPIE Optical Engineering + Applications (19-23 August, 2018; Optical Manufacturing and Testing XII; San Diego, CA, USA), San Diego, United States, vol. 10742
2018
ISBN: 978-1-5106-2055-1
DOI: 10.1117/12.2323245
NachhaltigIPH TeisnachVortrag
Christian Vogt, O. Fähnle, E. Langenbach, Rolf Rascher
In situ laser monitoring of laser polishing
119. Jahrestagung der Deutschen Gesellschaft für angewandte Optik (DGaO), Technische Hochschule Aalen
2018
Abstract anzeigen
A novel fabrication parameter controlling method for laser polishing is presented, measuring within the footprint the smoothening process in real time.
Recently, a new method for in situ measuring level of surface roughness has been developed [1] where a HeNe laser beam is being reflected from within the sample at the surface under test and the intensity of its reflected beam is being monitored.In this paper we report on an experimental study where this method has been applied to laser polishing. The internal local surface area under test is chosen to be located at the very spot where the laser polishing footprint is located from the outside of the sample melting its surface locally. Because fused silica is not transparent at the operating CO2 laser wavelength, the intensity of the reflected beam can be monitored enabling an in situ control of the laser polishing process. Consequently, the optimum dwell time can be determined, a footprint needs to stay at a certain point before moving further enabling a more stable and cost optimized polishing. [1] O.Fähnle,“In process monitoring of optics fabrication”, SPIEconference “PrecisionOptics Manufacturing”2017
NachhaltigAngewandte Naturwissenschaften und WirtschaftsingenieurwesenIPH TeisnachBeitrag (Sammelband oder Tagungsband)
Johannes Liebl, Christian Schopf, Rolf Rascher
DefGO
Proceedings of SPIE 10829 (Fifth European Seminar on Precision Optics Manufacturing [April 10-11, 2018; Teisnach])
2018
ISBN: 978-1-5106-2270-8
DOI: 10.1117/12.2318704
Abstract anzeigen
The manufacturing of optical lenses has various steps. Generally, the manufacturing can be split up into the following steps: the workpiece is pre-ground with a coarse tool; it is then fine-ground with a finer tool. As the final polishing is a demanding and time-consuming process that cannot manage large removal rations not can it equalise rough shape errors, the starting quality and surface quality needs to be as high as possible. According to the current state of technology, ground lenses must be measured with tactile measuring techniques in order to detect shape errors. This is timeconsuming and expensive, and only two dimensional profiles can be measured. DefGO’s project objective is to introduce deflectometry as a new, three dimensional lens measuring standard. A problem with the application of deflectometry is that the object to be measured has to reflect enough light, which is not the case for ground glass with rough surfaces. DefGO’s solution is to wet the lens with a fluid to create a closed reflecting surface.
NachhaltigAngewandte Naturwissenschaften und WirtschaftsingenieurwesenIPH TeisnachBeitrag (Sammelband oder Tagungsband)
Olga Kukso, Rolf Rascher, R. Börret, M. Pohl
On the metrology of the MSF errors
Proceedings of SPIE 10829 (Fifth European Seminar on Precision Optics Manufacturing [April 10-11, 2018; Teisnach])
2018
ISBN: 978-1-5106-2270-8
DOI: 10.1117/12.2318675
Abstract anzeigen
The aim of our research is to study middle spatial frequency errors (MSFE) on optical surfaces. We investigate the surfaces after all manufacturing processes to find out the main affecting factors and to choose the proper processing parameters to minimize the size of the errors. In this paper we describe some middle spatial frequency errors, which occur during grinding. As there are limited possibilities to measure ground surfaces, their analysis from the point of measurement is most difficult. Therefore, it is of utmost importance to optimally organize the measurement guaranteeing sufficient data for the reconstruction of the toolpath and avoidance of aliasing effects. In the paper discuss possible classifications and some difficulties during measuring of grinded surfaces.
NachhaltigAngewandte Naturwissenschaften und WirtschaftsingenieurwesenIPH TeisnachBeitrag (Sammelband oder Tagungsband)
Sebastian Sitzberger, Christian J. Trum, Rolf Rascher, M. Zaeh
Workpiece self-weight in precision optics manufacturing: compensation of workpiece deformations by a fluid bearing
Proceedings of SPIE 10829 (Fifth European Seminar on Precision Optics Manufacturing [April 10-11, 2018; Teisnach])
2018
ISBN: 978-1-5106-2270-8
DOI: 10.1117/12.2318577
Abstract anzeigen
The effects, the extent and the importance of workpiece deformations, particularly lenses, caused by the weight of the workpiece itself, were examined in a previous paper1 . The considered deformations are in the single-digit to two-digit nanometer range. The investigation was carried out by FEM calculations. The conclusion of the previous aper was that a full-surface support of a workpiece in the processing of one surface presumably produces the best results. Furthermore, it was found that if the second functional surface is not to be touched in the process, a full contact lens mounting on its circumference is advisable. An alternative method for fixing precision lenses is therefore desirable. This can be accomplished in two steps. As a first step, the lens must be gripped at its periphery so that none of the optically functional surfaces of the lens is compromised. However, the complete circumference has to be fixated gaplessly because a punctual fixation has the disadvantage of deforming the lens surface asymmetrically. As a second step, the freely hanging lens surface should be supported to minimize deformation. An approach had to be found that supports the surface like a solid bearing but at the same time does not touch it. Therefore, the usage of an incompressible fluid as a hydrostatic bearing for full-surface support is pursued. For this purpose, the bottom side of the lens has to be stored on water. The results of the FEM simulation showed that with a fluid bearing the resulting deformations can be drastically reduced in comparison to a freely hanging surface. Furthermore, under the right conditions, a resulting deformation comparable to a full surface solid support can be achieved. The content of this paper is a test series under laboratory conditions for a first validation of the theoretical results. Therefore, a prototype model to test a lens fixation with a fluid bearing was developed and manufactured. The resulting deformations were measured with an interferometer and the effects are discussed.
NachhaltigAngewandte Naturwissenschaften und WirtschaftsingenieurwesenIPH TeisnachBeitrag (Sammelband oder Tagungsband)
Alexander Haberl, Johannes Liebl, Rolf Rascher
ABC-polishing
Proceedings of SPIE 10829 (Fifth European Seminar on Precision Optics Manufacturing [April 10-11, 2018; Teisnach])
2018
ISBN: 978-1-5106-2270-8
DOI: 10.1117/12.2318549
Abstract anzeigen
In the past, steadily increasing demands on the imaging properties of optics have led more and more precise spherical apertures. For a long time, these optical components have been produced in a satisfying quality using classic polishing methods such as pitch polishing. The advance of computer-controlled subaperture (SA) polishing techniques improved the accuracy of spheres. However, this new machine technology also made it possible to produce new lens geometries, such as aspheres.
In contrast to classic polishing methods, the high determinism of SA polishing allows a very specific correction of the surface defect. The methods of magneto-rheological finishing (MRF) [1], [2] and ion beam figuring (IBF) [3], [4] stand out in particular because of the achievable shape accuracy. However, this leads to the fact that a principle of manufacturing "As exact as possible, as precise as necessary" [5] is often ignored. The optical surfaces often produced with unnecessary precision, result at least in increased processing times.
The increasing interconnection of the production machines and the linking with databases already enables a consistent database to be established. It is possible to store measurements, process characteristics or tolerances for the individual production steps in a structured way. The difficulty, however, lies in the reasonable evaluation of the measurement data.
This is where this publication comes in. The smart evaluation of the measurement data with the widespread Zernike polynomials should result in a classification, depending on the required manufacturing tolerance. In combination with the so-called ABC analysis, all surface defects can be categorized. In this way, an analytic breakdown of a - initially confusing - overall problem is made. With the aid of cost functions [6] an evaluation and consequently a deduction of actions is made possible. Thus, for example, the isolated processing of rotationally symmetrical errors in spiral mode, setup times and machining times can be reduced while avoiding mid spatial frequency errors (MSFE) at the same time.
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