NachhaltigF: Angewandte Naturwissenschaften und WirtschaftsingenieurwesenS: IPH TeisnachBeitrag (Sammelband oder Tagungsband)
Christian J. Trum, M. Jung, Beate Schmidbauer, Sebastian Sitzberger, E. Willenborg, Rolf Rascher
Hybrid-process-chain for polishing optical glass lenses – HyoptO
Proceedings of SPIE Optical Engineering + Applications (24 August - 04 September, 20208; Optical Manufacturing and Testing XIII; online conference), San Diego, United States, vol. 11487
2020
DOI: 10.1117/12.2568400
Abstract anzeigen
A number of process steps that build on one another are required to manufacture optical components from glass. The polishing steps are the most time-consuming and therefore cost-intensive parts of the process chain. Low removal rates and the depth of the Sub Surface Damage (SSD) to be removed contribute to this. An alternative for the complete removal of the SSD-penetrated material using contactless polishing methods such as Ion Beam Figuring (IBF) is the healing of the SSD. Due to the induced energy during laser-polishing, the material is remelted at the defects and the SSD are closed. However, laser-polishing is also associated with disadvantages in terms of shape accuracy and surface quality. The project HyoptO is therefore devoted to the development of a hybrid-process-chain consisting of laser processing and conventional polishing. It is expected that the healing times of the SSD can significantly reduce the process times in the subsequent polishing steps. However, there are a few questions to be answered regarding the economic use of the hybrid-process-chain. These include:
NachhaltigF: Angewandte Naturwissenschaften und WirtschaftsingenieurwesenS: IPH TeisnachBeitrag (Sammelband oder Tagungsband)
Sebastian Sitzberger, Johannes Liebl, Christian J. Trum, Rolf Rascher
Concept of a two-part clamping system for lenses in optical metrology
Proceedings of SPIE 11478 (Seventh European Seminar on Precision Optics Manufacturing [8 July 2020; Teisnach]), Bellingham, WA, USA
2020
DOI: 10.1117/12.2566547
Abstract anzeigen
The developed concept represents a universally applicable clamping system designed to fit in any measuring machine with
any measuring principle. The design ensures that, as long as the lens remains clamped, the measurement results are
reproducible. Form errors due to tension remain constant across all measuring and processing steps. The version presented
in this paper was developed especially for small lenses in the diameter range up to 40 mm. On the one hand, the design
allows for fast measurement of loose lenses. On the other hand, the device can also be used for measurement comparisons,
since lenses can also be mounted permanently. In the following, the concept and first results of measurement tests are
presented.
NachhaltigF: Angewandte Naturwissenschaften und WirtschaftsingenieurwesenS: IPH TeisnachBeitrag (Sammelband oder Tagungsband)
Armin Reif, Sebastian Sitzberger, Rolf Rascher
Cutting high-performance materials with ultrasonically modulated cutting speed
Proceedings of SPIE 11478 (Seventh European Seminar on Precision Optics Manufacturing [8 July 2020; Teisnach]), Bellingham, WA, USA
2020
DOI: 10.1117/12.2565757
Abstract anzeigen
The continuing trend towards lightweight construction and the associated machining rates of up to 95 % lead to an
increased use of high-performance materials. The ever growing demands on the strength and quality of components and
the associated use of materials which are hard to machine require the further development of new, economical machining
techniques. In ultrasonic-assisted machining, an additional high-frequency vibration is superimposed on the conventional
machining process. The vibration of the tool is usually excited axially or longitudinally to the workpiece, i.e. vertical to
the cutting direction. An additional vibration overlay around the rotation axis (torsional) of the tool is also possible. This
generates a vibration overlay in the cutting direction. The vibration initiation causes vibration amplitudes in the range of a
few micrometers at the tool cutting edge. This leads in turn to a high-frequency change in the cutting speed or feed rate.
Overall, an additional torsional vibration overlap can further reduce cutting forces, increase tool life and improve
workpiece quality.
In order for a grinding tool to generate a torsional vibration, a special tool was required that had to be designed by
simulation. The formation of a torsional vibration was achieved by helical slots in the sonotrode. Depending on the angle
of rotation and the length of the slots, a part of the axial vibration is converted into a torsional vibration by an axial
excitation of the sonotrode. The aim in designing the slots was to achieve the highest possible vibration amplitude.
Following the simulation, the slots were inserted into the tool in the corresponding optimum geometric position.
Afterwards, the specially designed grinding tool was validated by machining the brittle-hard glass-ceramic material
Zerodur. The first test results with the torsionally vibrating tool are presented in the following.
NachhaltigF: Angewandte Naturwissenschaften und WirtschaftsingenieurwesenS: IPH TeisnachBeitrag (Sammelband oder Tagungsband)
Sebastian Sitzberger, Johannes Liebl, J. Reitberger, Rolf Rascher
Zero-point clamping systems in optical production
Proceedings of SPIE 11171 (Sixth European Seminar on Precision Optics Manufacturing, 1117101 [9-10 April 2019, Teisnach]), Bellingham, WA, USA
2019
DOI: 10.1117/12.2528774
Abstract anzeigen
Zero point clamping systems are an integral part of the manufacturing industry. They have only yet to find their way into the optical industry. This article compares the hydraulic expansion holder, a clamping system currently used in the optical industry with a zero-point clamping system. The achievable accuracies of both systems are compared over several measurement series. In addition, the process capability evaluation is used for the comparison. Finally, the results are summarized to provide every researcher and practitioner with a foundation for assessing whether zero point clamping systems meet the requirements for the use in optical manufacturing.
NachhaltigF: Angewandte Naturwissenschaften und WirtschaftsingenieurwesenS: IPH TeisnachBeitrag (Sammelband oder Tagungsband)
Christian J. Trum, Sebastian Sitzberger, Rolf Rascher
Improved performance of CMP processes through targeted adjustment of polishing slurry and polish pad
Proceedings of SPIE Optical Engineering + Applications (19-23 August, 2018; Optical Manufacturing and Testing XII; San Diego, CA, USA), San Diego, United States, vol. 10742
2018
ISBN: 978-1-5106-2055-1
DOI: 10.1117/12.2321031
Abstract anzeigen
Chemical-mechanical polishing (CMP) of optical glasses is widespread and forms the basis for many high-precision polishing processes. The pads, slurries and glass materials used in polishing have many different properties. The effects of these properties on the process results are often unknown. The right choice and combination is therefore often a challenge.
By means of a plan processing of N-BK7 and SF56 samples by a plan-polishing process, the influence on the process results, material removal rate (MRR), micro roughness and cleanliness caused by slurry and polishing pad is shown. It turns out that the type of polish pad has the biggest impact on the results. The easy-to-process material N-BK7 shows only little influence by the type of slurry used. The more challenging SF56, however, shows significant effects, especially in the area of the resulting micro roughness and the appearance of surface damages like orange peel. Especially the use of Auerpol® PZ500 shows clear advantages here.
For a selection of three out of nine polishing pads, the effect of density variation of the slurry was also investigated. Lower particle concentrations lead to lower material removal rates. This applies to both materials. The more sensitive SF56 shows a reduction in micro roughness by the use of a less dense slurry.
The correct selection of the polishing pad has a positive effect on the material removal rate and/or the micro roughness in all tested materials. An adaptation of the type and concentration of the slurry is especially important for more sensitive materials and in combination with the right polishing pad.
In view of the development towards special materials and small lot sizes, the targeted and correct selection of polishing slurries and pads becomes more and more important. The information required for this purpose on the behavior of the pads and slurries available on the market must therefore first be determined in a targeted manner and clearly presented.
NachhaltigF: Angewandte Naturwissenschaften und WirtschaftsingenieurwesenS: IPH TeisnachBeitrag (Sammelband oder Tagungsband)
Sebastian Sitzberger, Christian J. Trum, Rolf Rascher, M. Zaeh
Workpiece self-weight in precision optics manufacturing: compensation of workpiece deformations by a fluid bearing
Proceedings of SPIE 10829 (Fifth European Seminar on Precision Optics Manufacturing [April 10-11, 2018; Teisnach])
2018
ISBN: 978-1-5106-2270-8
DOI: 10.1117/12.2318577
Abstract anzeigen
The effects, the extent and the importance of workpiece deformations, particularly lenses, caused by the weight of the workpiece itself, were examined in a previous paper1 . The considered deformations are in the single-digit to two-digit nanometer range. The investigation was carried out by FEM calculations. The conclusion of the previous aper was that a full-surface support of a workpiece in the processing of one surface presumably produces the best results. Furthermore, it was found that if the second functional surface is not to be touched in the process, a full contact lens mounting on its circumference is advisable. An alternative method for fixing precision lenses is therefore desirable. This can be accomplished in two steps. As a first step, the lens must be gripped at its periphery so that none of the optically functional surfaces of the lens is compromised. However, the complete circumference has to be fixated gaplessly because a punctual fixation has the disadvantage of deforming the lens surface asymmetrically. As a second step, the freely hanging lens surface should be supported to minimize deformation. An approach had to be found that supports the surface like a solid bearing but at the same time does not touch it. Therefore, the usage of an incompressible fluid as a hydrostatic bearing for full-surface support is pursued. For this purpose, the bottom side of the lens has to be stored on water. The results of the FEM simulation showed that with a fluid bearing the resulting deformations can be drastically reduced in comparison to a freely hanging surface. Furthermore, under the right conditions, a resulting deformation comparable to a full surface solid support can be achieved. The content of this paper is a test series under laboratory conditions for a first validation of the theoretical results. Therefore, a prototype model to test a lens fixation with a fluid bearing was developed and manufactured. The resulting deformations were measured with an interferometer and the effects are discussed.
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