NachhaltigF: Angewandte Naturwissenschaften und Wirtschaftsingenieurwesen
Engelbert Hofbauer, Rolf Rascher, Manon Schilke, Johannes Liebl, J.-P. Richters
Deflectometric Acquisition of Large Optical Surfaces “DaOS” Using a New Physical Measurement Principle: Vignetting Field Stop
(Reprinted from Proceedings of SPIE Volume 10009: Third European Seminar on Precision Optics Manufacturing, 100090Y [Teisnach, April 12th 2016] doi:10.1117/12.2236134)
Bavarian Journal of Applied Sciences, no. 2, pp. 146-161
The vignetting field stop procedure uses a deflectometric approach to acquire big Optical Surfaces – DaOS – and it offers the possibility to measure nearly any shape or form using a scanning routine.
The basic physical measurement principle in DaOS is the vignettation of a quasi-parallel light beam emitted by an expanded light source in auto collimation arrangement with a reflecting element. Thereby nearly any curvature of the specimen, is measurable. Due to the fact, that even sign changes in the curvature can be detected, also aspheres and freeform surfaces of any size can be evaluated.
In this publication the vignetting field stop procedure is discussed. Additionally the deflectometric setup is described. Because of some typical influences of beam deflection to the accuracy of angle measurement by using the vignetting principle, suitable methods of calibration for the sensor are examined and the results of these methods are presented.
Furthermore, the technical principle of deflectometric measurements using an angle detecting device is explained inclusive of all random and systematic errors generated by the setup.
The last part of this publication shows the actual result of test measurements with calculated absolute deviation of errors with a large lateral dimension as well as the determination of the maximal achievable lateral resolution by detecting mid frequent structures on flat and spherical test parts with a diameter of 300 mm. These measurements are compared critically to reference results which are recorded by interferometry and further scanning methods.