Publikationen
Suche nach „[W.] [Lehnert]“ hat 13 Publikationen gefunden
Suchergebnis als PDFPatent
R. Berger, W. Lehnert, G. Metzger-Brueckl, Günther Ruhl, R. Rupp
Wafer composite and method for producing semiconductor components
2020
Patent
W. Lehnert, R. Berger, A. Birner, H. Brech, O. Haeberlen, Günther Ruhl, R. Rupp
Method of manufacturing semiconductor devices by bonding a semiconductor disk on a base substrate, composite wafer and semiconductor device
2019
Patent
Günther Ruhl, W. Lehnert, R. Berger
Two-dimensional material containing electronic components
2017
Patent
R. Berger, H. Gruber, W. Lehnert, Günther Ruhl, R. Foerg, A. Mauder, H.-J. Schulze, M. Sommer, C. Rottmair, R. Rupp
Method for manufacturing a composite wafer having a graphite core, and composite wafer having a graphite core
2017
Patent
R. Berger, H.-J. Schulze, A. Mauder, W. Lehnert, Günther Ruhl, R. Rupp
Composite wafer for bonding and encapsulation of a SiC-based functional layer
2016
Patent
R. Berger, H. Gruber, W. Lehnert, Günther Ruhl, R. Foerg, A. Mauder, H.-J. Schulze
Method for manufacturing a composite wafer having a graphite core
2016
Patent
R. Berger, H. Gruber, W. Lehnert, Günther Ruhl, R. Foerg, A. Mauder, H.-J. Schulze, M. Sommer, C. Rottmair, R. Rupp
Method for manufacturing a composite wafer having a graphite core, and composite wafer having a graphite core
2015
Patent
R. Berger, Günther Ruhl, W. Lehnert, R. Rupp
Compound structure and method for forming a compound structure
2015
Patent
R. Berger, H. Gruber, W. Lehnert, Günther Ruhl, R. Foerg, A. Mauder, H.-J. Schulze, M. Sommer, C. Rottmair, R. Rupp
Method for manufacturing a composite wafer having a graphite core, and composite wafer having a graphite core
2014
Zeitschriftenartikel
Günther Ruhl, W. Lehnert, M. Lukosius, C. Wenger, C. Baristiran Kaynak, T. Blomberg, S. Haukkac, P. Baumann, W. Besling, A. Roeste, B. Riou, S. Lhostif, A. Halimaou, F. Roozeboom, E. Langereis, W.M.M. Kessels, A. Zauner, S. Rushworth
Dielectric Material Options for Integrated Capacitors
ECS Journal of Solid State Science and Technology, vol. 3, no. 8
2014
Patent
R. Berger, H. Gruber, W. Lehnert, Günther Ruhl, R. Foerg, A. Mauder, H.-J. Schulze
Method for manufacturing a composite wafer having a graphite core, and composite wafer having a graphite core
2013
Zeitschriftenartikel
W. Lehnert, Günther Ruhl, A. Gschwandtner
Plasma enhanced atomic layer batch processing of aluminum doped titanium dioxide
Journal of Vacuum Science & Technology A, vol. 30, no. 1
2012
Vortrag
Günther Ruhl, W. Lehnert, C. Wenger
CVD grown ternary high-k oxides for MIM capacitors
Novel High-k Applications Workshop, Dresden
2011