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Suche nach „[Schilke] [Manon]“ hat 3 Publikationen gefunden
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    NachhaltigAngewandte Naturwissenschaften und Wirtschaftsingenieurwesen

    Zeitschriftenartikel

    J.-P. Richters, Rolf Rascher, Johannes Liebl, Engelbert Hofbauer, Manon Schilke

    Deflectometric Acquisition of Large Optical Surfaces “DaOS” Using a New Physical Measurement Principle: Vignetting Field Stop

    (Reprinted from Proceedings of SPIE Volume 10009: Third European Seminar on Precision Optics Manufacturing, 100090Y [Teisnach, April 12th 2016] doi:10.1117/12.2236134)

    Bavarian Journal of Applied Sciences, no. 2, pp. 146-161

    2016

    Abstract anzeigen

    The vignetting field stop procedure uses a deflectometric approach to acquire big Optical Surfaces – DaOS – and it offers the possibility to measure nearly any shape or form using a scanning routine. The basic physical measurement principle in DaOS is the vignettation of a quasi-parallel light beam emitted by an expanded light source in auto collimation arrangement with a reflecting element. Thereby nearly any curvature of the specimen, is measurable. Due to the fact, that even sign changes in the curvature can be detected, also aspheres and freeform surfaces of any size can be evaluated. In this publication the vignetting field stop procedure is discussed. Additionally the deflectometric setup is described. Because of some typical influences of beam deflection to the accuracy of angle measurement by using the vignetting principle, suitable methods of calibration for the sensor are examined and the results of these methods are presented. Furthermore, the technical principle of deflectometric measurements using an angle detecting device is explained inclusive of all random and systematic errors generated by the setup. The last part of this publication shows the actual result of test measurements with calculated absolute deviation of errors with a large lateral dimension as well as the determination of the maximal achievable lateral resolution by detecting mid frequent structures on flat and spherical test parts with a diameter of 300 mm. These measurements are compared critically to reference results which are recorded by interferometry and further scanning methods.

    NachhaltigAngewandte Naturwissenschaften und Wirtschaftsingenieurwesen

    Beitrag (Sammelband oder Tagungsband)

    J.-P. Richters, Rolf Rascher, Johannes Liebl, Engelbert Hofbauer, Manon Schilke

    Deflectometric acquisition of large optical surfaces (DaOS) using a new physical measurement principle: vignetting field stop procedure

    Proceedings of SPIE 10009 (Third European Seminar on Precision Optics Manufacturing, 100090Y [April 12th 2016, Teisnach])

    2016

    DOI: 10.1117/12.2236134

    NachhaltigAngewandte Naturwissenschaften und Wirtschaftsingenieurwesen

    Beitrag (Sammelband oder Tagungsband)

    Christine Wünsche, Johannes Liebl, Manon Schilke

    Surface reconstruction by using Zernike polynomials

    Proceedings of SPIE 10009 (Third European Seminar on Precision Optics Manufacturing, 100090Y [April 12th 2016, Teisnach])

    2016

    DOI: 10.1117/12.2236305

    Abstract anzeigen

    The development of high precision methods for the measurement of plano surfaces became of increasing importance over the last years. Recently accuracies in sub-nanometer range have been achieved on samples up to one meter in diameter. The used measurement method was based on direct deflectometry. The main part of the system was an electronic autocollimator measuring local angular displacements on defined traces along the surface of the plano lens. To stabilize the optical path a pentaprism was used. The measurement accuracy of a similar system was evaluated at the Technologie Campus Teisnach. The used system delivered twenty measurement spots along the profile on one diameter. Four diameters were measured at every 45 degrees. An evaluation algorithm was developed to model the complete threedimensional surface out of a small amount of measurement points. Within this modelling Zernike polynomials were used to reconstruct the surface topography. Two different approaches in using the hierarchy of the polynomials were compared. At first a reference surface was created by rotating a symmetrical averaged curve of all measured profiles. On the residuals of the original measurements to the symmetrical averaged curve a serial development of the error surface was applied with the help of Zernike polynomials. Different order of Zernike terms were tested because we saw a big influence on the result. This surface was added to the reference surface. The results of the two different approaches were compared. To enable us to compare the results of this measurement method to interferometric and optical 3Dprofilometric measurements the data was converted to xyz-format. © (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.