Suche nach „[R.] [Rodríguez]“ hat 9 Publikationen gefunden

NachhaltigElektrotechnik und MedientechnikIQMA

Vortrag

Tobias Berthold, Günther Benstetter, Werner Frammelsberger, Manuel Bogner, R. Rodríguez, M. Nafría

Protective nanometer films for reliable Cu-Cu connections

Invited Talk

IEEE International Reliability Physics Symposium (IRPS), San Francisco, CA, USA

2018

NachhaltigElektrotechnik und MedientechnikIQMAMaschinenbau und Mechatronik

Beitrag (Sammelband oder Tagungsband)

Tobias Berthold, Günther Benstetter, Werner Frammelsberger, Manuel Bogner, R. Rodríguez, M. Nafría

Protective nanometer films for reliable Cu-Cu connections

Best Paper Award

Proceedings of the 28h European Symposium on Reliability of Electron Devices, Failure Physics and Analysis (ESREF) [25-28 September, 2017; Bordeaux, Frankreich]

2017

NachhaltigElektrotechnik und MedientechnikIQMAMaschinenbau und Mechatronik

Zeitschriftenartikel

Tobias Berthold, Günther Benstetter, Werner Frammelsberger, R. Rodríguez, M. Nafría

Numerical Study of Hydrodynamic Forces for AFM Operations in Liquid Scanning (Article ID 6286595, 12 pages)

Scanning, no. Article ID 6286595, pp. 1-12

2017

DOI: 10.1155/2017/6286595

Abstract anzeigen

For advanced atomic force microscopy (AFM) investigation of chemical surface modifications or very soft organic sample surfaces, the AFM probe tip needs to be operated in a liquid environment because any attractive or repulsive forces influenced by the measurement environment could obscure molecular forces. Due to fluid properties, the mechanical behavior of the AFM cantilever is influenced by the hydrodynamic drag force due to viscous friction with the liquid. This study provides a numerical model based on computational fluid dynamics (CFD) and investigates the hydrodynamic drag forces for different cantilever geometries and varying fluid conditions for Peakforce Tapping (PFT) in liquids. The developed model was verified by comparing the predicted values with published results of other researchers and the findings confirmed that drag force dependence on tip speed is essentially linear in nature. We observed that triangular cantilever geometry provides significant lower drag forces than rectangular geometry and that short cantilever offers reduced flow resistance. The influence of different liquids such as ultrapure water or an ethanol-water mixture as well as a temperature induced variation of the drag force could be demonstrated. The acting forces are lowest in ultrapure water, whereas with increasing ethanol concentrations the drag forces increase.

NachhaltigElektrotechnik und MedientechnikIQMAMaschinenbau und Mechatronik

Zeitschriftenartikel

Tobias Berthold, Günther Benstetter, Werner Frammelsberger, Manuel Bogner, R. Rodríguez, M. Nafría

Protective nanometer films for reliable Cu-Cu connections

Microelectronics Reliability, vol. 76-77, no. September, pp. 383-389

2017

DOI: 10.1016/j.microrel.2017.07.001

NachhaltigElektrotechnik und MedientechnikIQMA

Zeitschriftenartikel

Tobias Berthold, Günther Benstetter, Werner Frammelsberger, R. Rodríguez, M. Nafría

Nanoscale characterization of CH3-terminated Self-Assembled Monolayer on copper by advanced scanning probe microscopy techniques

Applied Surface Science, vol. 356, pp. 921-926

2015

DOI: 10.1016/j.apsusc.2015.08.182

Abstract anzeigen

In this study, we used Self-Assembled Monolayer (SAM) with CH3 end-group molecules to protect copper surfaces from oxidation and investigated at nanometer scale the integrity and temperature stability of the protective film. The films were characterized by dynamic Chemical Force Microscopy (dCFM), Torsional Resonance Tunneling Atomic Force Microscopy (TR-TUNA) and Attenuated Total Reflection Fourier Transform Infrared Spectroscopy (ATR-FTIR). We observed that temperature stress degraded local properties of our SAM films significantly, when compared to unstressed films. After temperature stress at 100 °C, tunneling current increased and hydrophobicity decreased substantially. In combination with the ATR-FTIR results we assigned local high current spots and local hydrophobic variations to cuprous oxide (Cu2O). After temperature stress at 150 °C, the measurements indicate a decomposition of the SAM film and a further oxidation of the copper surface. In addition, the results show that dynamic dCFM and TR-TUNA are appropriate tools to characterize SAM films structurally, chemically and electrically. Most important, in contrast to conventional contact mode Atomic Force Microscopy techniques, we did not observe any damage to the SAM film by dCFM and TR-TUNA measurements.

NachhaltigElektrotechnik und MedientechnikIQMA

Zeitschriftenartikel

Tobias Berthold, Günther Benstetter, Werner Frammelsberger, R. Rodríguez, M. Nafría

Nanoscale characterization of copper oxide films by Kelvin Probe Force Microscopy

Thin Solid Films, vol. 584, no. June 2015, pp. 310-315

2015

DOI: 10.1016/j.tsf.2015.01.071

Abstract anzeigen

In this work Peakforce Kelvin Probe Force Microscopy (PF-KPFM) at ambient environment is used to characterize both oxidation states of copper (Cu) surfaces, cupric oxide CuO and cuprous oxide Cu2O, with high lateral resolution. Characteristic values of the contact potential difference were obtained for the copper oxide states. By this means, PF-KPFM measurements enabled to distinguish between the different types of Cu oxide with nanometer resolution and to correlate the oxidation states to local topography features. It was even possible to identify single oxide grains on top of the Cu surface. As a result, PF-KPFM is able to address the needs for nanoscale characterization methods in semiconductor manufacturing or other related technologies where the local oxidation behavior of copper is a critical issue.

Elektrotechnik und MedientechnikIQMAMaschinenbau und Mechatronik

Vortrag

Tobias Berthold, Günther Benstetter, Werner Frammelsberger, R. Rodríguez, M. Nafría

Characterization of Self-Assembled Monolayers on Copper by Scanning Probe Microscopy

16th International Conference on Thin Films (ICTF16), Dubrovnik, Kroatien

2014

Elektrotechnik und MedientechnikIQMAMaschinenbau und Mechatronik

Vortrag

Tobias Berthold, Günther Benstetter, Werner Frammelsberger, R. Rodríguez, M. Nafría

Nanoscale copper oxide characterization with Kelvin Probe Force Microscopy

Posterpräsentation

The 7th International Conference on Technological Advances of Thin Films & Surface Coatings (THINFILMS2014), Chongquing, China

2014

Elektrotechnik und MedientechnikIQMAMaschinenbau und Mechatronik

Vortrag

Tobias Berthold, Günther Benstetter, Werner Frammelsberger, R. Rodríguez, M. Nafría, Raimund Förg

Analysis of copper oxide films by combined scanning microscopy

6th International Conference on Technological Advances of Thin Films & Surface Coatings (THINFILMS2012), Singapur, Singapur

2012