Publikationen
Suche nach „[R.] [Biberger]“ hat 13 Publikationen gefunden
Suchergebnis als PDFVortrag
Alexander Hofer, R. Biberger, Günther Benstetter, B. Wilke, H. Göbel
Scanning probe microscopy based electrical characterization of thin dielectric and organic semiconductor films
24th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis (ESREF), Arcachon, Frankreich
2013
Zeitschriftenartikel
Alexander Hofer, R. Biberger, Günther Benstetter, B. Wilke, H. Göbel
Scanning probe microscopy based electrical characterization of thin dielectric and organic semiconductor films
Microelectronics Reliability, vol. 53, no. 9-11, pp. 1430-1433
2013
Zeitschriftenartikel
Alexander Hofer, Günther Benstetter, R. Biberger, C. Leirer, G. Brüderl
Analysis of crystal defects on GaN based semiconductors with advanced scanning probe microscope technique
Thin Solid Films, vol. 544, no. Oktober, pp. 139-143
2013
Vortrag
Alexander Hofer, Günther Benstetter, R. Biberger, C. Leirer, G. Brüderl
Analysis of crystal defects on GaN-based semiconductors with advanced scanning probe microscope techniques
Invited Talk
6th International Conference on Technological Advances of Thin Films & Surface Coatings (THINFILMS2012), Singapur, Singapur
2012
Vortrag
Alexander Hofer, B. Wilke, R. Biberger, Günther Benstetter, H. Göbel
Capacitance and Conductivity Mapping of Organic Films and Devices with Non-Contact SPM Methods
International Workshop on Scanning Probe Microscopy for Energy Applications, Mainz
2011
Zeitschriftenartikel
R. Biberger, Günther Benstetter, et al.
Intermittent-Contact Capacitance Spectroscopy – A new method for determining C(V) curves with sub-micron lateral resolution
Microelectronics Reliability, vol. 50, pp. 1511-1513
2010
Vortrag
R. Biberger, Günther Benstetter
Displacement Current Sensor for two-dimensional dopant profiling
ITG Discussion, Grainau
2010
Vortrag
Günther Benstetter, R. Biberger, Alexander Hofer, H. Göbel
Intermittent-Contact Scanning Capacitance Analysis of Thin Dielectric Films and Semiconductor Devices
Invited Talk
5th International Conference on Technological Advances of Thin Films & Surface Coatings, Harbin, China
2010
Zeitschriftenartikel
Günther Benstetter, R. Biberger, D. Liu
A Review of Advanced Scanning Probe Microscope Analysis of Functional Films and Semiconductor Devices
Thin Solid Films, vol. 517, no. 17, pp. 5100-5105
2009
Zeitschriftenartikel
R. Biberger, Günther Benstetter, H. Göbel
Displacement current sensor for contact and intermittent contact scanning capacitance microscopy
Microelectronics Reliability, vol. 49, no. 1, pp. 1192-1195
2009
Vortrag
Günther Benstetter, R. Biberger, D. Liu
A Review of Advanced Scanning Probe Microscope Analysis of Functional Films and Semiconductor Devices
Invited Talk
Thin Films, Singapur
2008
Vortrag
Dopant profiling with Intermittent-Contact Scanning Capacitance Microscopy
ITG Discussion, Grainau
2008
Zeitschriftenartikel
R. Biberger, Günther Benstetter, T. Schweinböck, Peter Breitschopf, H. Göbel
Intermittent-contact scanning capacitance microscopy versus contact mode SCM applied to 2D dopant profiling
Microelectronics Reliability, vol. 48 (8-9), pp. 1339-1349
2008