Publikationen
Suche nach „[Peter] [Breitschopf]“ hat 12 Publikationen gefunden
Suchergebnis als PDFZeitschriftenartikel
R. Biberger, Günther Benstetter, T. Schweinböck, Peter Breitschopf, H. Göbel
Intermittent-contact scanning capacitance microscopy versus contact mode SCM applied to 2D dopant profiling
Microelectronics Reliability, vol. 48 (8-9), pp. 1339-1349
Vortrag
Werner Frammelsberger, Günther Benstetter, T. Schweinböck, R. Stamp, J. Kiely, Peter Breitschopf
Atomic Force Microscopy Studies of Thin and Ultra-thin SiO2 Films
Final Report
2nd VDE World Microtechnologies Congress, München
Vortrag
Günther Benstetter, Werner Frammelsberger, D. Liu, Peter Breitschopf
Failure analysis of deep sub-micron semiconductor structures and thin films with atomic force microscopy methods
First International conference on Engineering Failure Analysis (ICEFA), Lissabon, Portugal
Vortrag
Günther Benstetter, Peter Breitschopf, B. Knoll, Edgar Lodermeier, Alexander Hofer, Werner Frammelsberger
Intermittent Contact Scanning Capacitance Microscopy-First Results
Workshop on Scanning Probe Microscopy and Related Techniques, Villach, Österreich
Vortrag
Günther Benstetter, Werner Frammelsberger, Edgar Lodermeier, Heiko Ranzinger, D. Liu, Peter Breitschopf, W. Bergbauer, Alexander Hofer
Raster-Sonden-Mikroskopie (SPM) in der Fehler- und Zuverlässigkeitsanalytik
VDE Fehlermechanismen bei kleinen Geometrien, Grainau
Vortrag
Günther Benstetter, Peter Breitschopf, B. Knoll, Werner Frammelsberger
Intermittent contact scanning capacitance microscopy – An improved method for 2D doping profiling
Nanotech Northern Europe, Helsinki, Finnland
Vortrag
T. Schweinböck, S. Schömann, D. Alvarez, M. Buzzu, Günther Benstetter, Werner Frammelsberger, Peter Breitschopf
New Trends in the application of scanning probe techniques in failure analysis
15th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis (ESREF), Zürich, Schweiz
Vortrag
Günther Benstetter, Peter Breitschopf, Werner Frammelsberger, Heiko Ranzinger, P. Reislhuber, T. Schweinböck
AFM-based scanning capacitance techniques for deep sub-micron semiconductor failure analysis
15th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis (ESREF), Zürich, Schweiz
Vortrag
Peter Breitschopf, Günther Benstetter, B. Knoll, Werner Frammelsberger
Intermittent contact scanning capacitance microscopy-A novel method for 2D doping profiling
16th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis (ESREF), Arcachon, Frankreich
Zeitschriftenartikel
Günther Benstetter, Peter Breitschopf, Werner Frammelsberger, Heiko Ranzinger, P. Reislhuber, T. Schweinböck
AFM-based scanning capacitance techniques for deep sub-micron semiconductor failure analysis
Microelectronics Reliability, vol. 44, no. 9-11, pp. 1615-1619
Zeitschriftenartikel
T. Schweinböck, S. Schömann, D. Alvarez, M. Buzzu, Günther Benstetter, Werner Frammelsberger, Peter Breitschopf
New Trends in the application of scanning probe techniques in failure analysis
Microelectronics Reliability, vol. 44, no. 9-11, pp. 1541-1546
Zeitschriftenartikel
Peter Breitschopf, Günther Benstetter, B. Knoll, Werner Frammelsberger
Intermittent contact scanning capacitance microscopy-A novel method for 2D doping profiling
Microelectronics Reliability, vol. 45, pp. 1568-1571