Suche nach „[M.] [Wagner]“ hat 12 Publikationen gefunden

DigitalNachhaltigExtern

Beitrag (Sammelband oder Tagungsband)

Anton Schmailzl, T. Amann, M. Glockner, M. Fadanelli, M. Wagner, S. Hierl

Finite element analysis of thermoplastic probes under tensile load using ls-dyna compared to ansys workbench 14 in correlation to experimental investigations

Elektronischer Tagungsband ANSYS Conference & 30th CADFEM Users' Meeting - ACUM (24.-26.10.2012; Kassel)

NachhaltigEuropan Campus Rottal-Inn

Vortrag

Oliveira Hansen, R. M. D., M. Mátéfi-Tempfli, S. Chemnitz, T. Reimer, B. Wagner, Stefan Mátéfi-Tempfli, W. Benecke, H.-G. Rubahn

Electromagnetic actuation in MEMS switches

100% CLIMATE NEUTRALITY Conference, Sønderborg, Denmark

DigitalMobilEuropan Campus Rottal-Inn

Zeitschriftenartikel

de Oliveira Hansen, R. M. D., M. Mátéfi-Tempfli, R. Safonovs, J. Adam, S. Chemnitz, T. Reimer, B. Wagner, W. Benecke, Stefan Mátéfi-Tempfli

Magnetic films for electromagnetic actuation in MEMS switches

Microsystem Technologies, vol. 24, no. 4, pp. 1987-1994

DOI: 10.1007/s00542-017-3595-2

Abstract anzeigen

This paper investigates the fabrication of magnetic films via electroplating to be applied into electromagnetic actuated micro electro-mechanical systems (MEMS) switches. Cobalt and nickel films (1 µm thicknesses) were deposited on gold coated silicon substrates via electrochemical deposition. Different deposition conditions were investigated, regarding temperature and deposition voltage. The films morphologies were characterized via atomic force microscopy, while the magnetic properties of the films were characterized via vibrating sample magnetometer measurements. In order to evaluate the integration of these magnetic films into MEMS switches with low energy consumption, a mathematical model was developed and the results show that these films can be applied into efficient actuation with reduced power dissipation.

Maschinenbau und Mechatronik

Beitrag (Sammelband oder Tagungsband)

Giuseppe Bonfigli, M. Kloker, S. Wagner

3-D-boundary-layer transition induced by superposed steady and travelling crossflow vortices

High performance computing in science and engineering '02, [S.l.]

ISBN: 978-3-642-63947-0

Maschinenbau und Mechatronik

Beitrag (Sammelband oder Tagungsband)

Roswitha Giedl-Wagner, Hans Helml, F. Wagner, M. Wild

Geometrical aspects of laser-drilled high precision holes for flow control applications

Proceedings of SPIE - Fourth International Symposium on Laser Precision Microfabrication, München, 21.06.2003, vol. 5063

Elektrotechnik und MedientechnikIQMA

Vortrag

S. Rogowsky, R. Ostendorf, G. Kaufel, W. Pletschen, J. Wagner, S. Liebich, M. Zimprich, K. Volz, W. Stolz, B. Kunert, Edgar Lodermeier, Heiko Ranzinger, Günther Benstetter

Characteristics of diode laser structures on silicon substrates based on the Ga(NAsP)/(BGa)(AsP) materials combination

Photonics West, San Francisco, CA, USA

Maschinenbau und Mechatronik

Vortrag

F. Wagner, Roswitha Giedl-Wagner, M. Wild, Hans Helml

Laser drilling applications in fuel injection systems

ALAC, Detroit, MI, USA

Maschinenbau und Mechatronik

Vortrag

Roswitha Giedl-Wagner, Hans Helml, F. Wagner, M. Wild

Geometrical aspects of laser-drilled high precision holes for flow control applications

4. Internationales Symposium „Laser Precision Microfabrication – LPM 2003, München

Maschinenbau und Mechatronik

Vortrag

M. Wild, Roswitha Giedl-Wagner, F. Wagner, Hans Helml

Geometrical aspects of laser-drilled high precision holes for flow control applications

AILU Technology Workshop – Applications of Laser Microprocessing, Oxford, Großbritannien

Maschinenbau und Mechatronik

Vortrag

Roswitha Giedl-Wagner, F. Wagner, A. Pauli, M. Wild, Hans Helml

Laser microstructuring of metal – a comparative study

Laser Assisted Net Shape Engineering (LANE) 2004, Erlangen

Maschinenbau und Mechatronik

Vortrag

Roswitha Giedl-Wagner, F. Wagner, M. Wild, Hans Helml

Bohren von Metall mit Nanosekundenlaser

Forum Photonics BW – Präzisionsbohren mit Kurzpulslasern, Stuttgart

Maschinenbau und Mechatronik

Vortrag

Roswitha Giedl-Wagner, M. Wild, F. Wagner, Hans Helml, et al.

Bohren mit der Trepanieroptik

Stuttgarter Lasertage (SLT) 2003, Stuttgart