Suche nach „[M.] [Wagner]“ hat 14 Publikationen gefunden

DigitalMobilEuropan Campus Rottal-Inn

Zeitschriftenartikel

W. Benecke, J. Adam, M. Mátéfi-Tempfli, T. Reimer, de Oliveira Hansen, R. M. D., R. Safonovs, B. Wagner, S. Chemnitz, Stefan Mátéfi-Tempfli

Magnetic films for electromagnetic actuation in MEMS switches

Microsystem Technologies, vol. 24, no. 4, pp. 1987-1994

2018

DOI: 10.1007/s00542-017-3595-2

Abstract anzeigen

This paper investigates the fabrication of magnetic films via electroplating to be applied into electromagnetic actuated micro electro-mechanical systems (MEMS) switches. Cobalt and nickel films (1 µm thicknesses) were deposited on gold coated silicon substrates via electrochemical deposition. Different deposition conditions were investigated, regarding temperature and deposition voltage. The films morphologies were characterized via atomic force microscopy, while the magnetic properties of the films were characterized via vibrating sample magnetometer measurements. In order to evaluate the integration of these magnetic films into MEMS switches with low energy consumption, a mathematical model was developed and the results show that these films can be applied into efficient actuation with reduced power dissipation.

DigitalElektrotechnik und Medientechnik

Beitrag (Sammelband oder Tagungsband)

Nicolas Tiefnig, J. Sahu, A. Samiee, László Juhász, M. Wagner, A. Baumgartner

Model-Driven Engineering in Education

Proceedings of the 2018 18th International Conference on Mechatronics – Mechatronika (ME) (December 5-7, 2018; Brno, Czech Republic)

2018

Maschinenbau und Mechatronik

Beitrag (Sammelband oder Tagungsband)

M. Kloker, Giuseppe Bonfigli, S. Wagner

3-D-boundary-layer transition induced by superposed steady and travelling crossflow vortices

High performance computing in science and engineering '02, [S.l.]

2014

ISBN: 978-3-642-63947-0

Elektrotechnik und Medientechnik

Vortrag

Edgar Lodermeier, B. Kunert, R. Ostendorf, J. Wagner, M. Zimprich, S. Liebich, W. Pletschen, Heiko Ranzinger, Günther Benstetter, G. Kaufel, S. Rogowsky, K. Volz, W. Stolz

Characteristics of diode laser structures on silicon substrates based on the Ga(NAsP)/(BGa)(AsP) materials combination

Photonics West, San Francisco, CA, USA

2012

Maschinenbau und Mechatronik

Vortrag

F. Wagner, Hans Helml, Roswitha Giedl-Wagner, M. Wild

Laser drilling applications in fuel injection systems

ALAC, Detroit, MI, USA

2004

Maschinenbau und Mechatronik

Beitrag (Sammelband oder Tagungsband)

F. Wagner, Hans Helml, Roswitha Giedl-Wagner, M. Wild

Geometrical aspects of laser-drilled high precision holes for flow control applications

Proceedings of SPIE - Fourth International Symposium on Laser Precision Microfabrication, München, 21.06.2003, vol. 5063

2003

Maschinenbau und Mechatronik

Vortrag

F. Wagner, Hans Helml, Roswitha Giedl-Wagner, M. Wild

Geometrical aspects of laser-drilled high precision holes for flow control applications

4. Internationales Symposium „Laser Precision Microfabrication – LPM 2003, München

2003

Maschinenbau und Mechatronik

Vortrag

F. Wagner, Hans Helml, Roswitha Giedl-Wagner, M. Wild

Geometrical aspects of laser-drilled high precision holes for flow control applications

AILU Technology Workshop – Applications of Laser Microprocessing, Oxford, Großbritannien

2003

Maschinenbau und Mechatronik

Vortrag

F. Wagner, Hans Helml, Roswitha Giedl-Wagner, M. Wild, et al.

Bohren mit der Trepanieroptik

Stuttgarter Lasertage (SLT) 2003, Stuttgart

2003

Maschinenbau und Mechatronik

Vortrag

F. Wagner, Hans Helml, Roswitha Giedl-Wagner, M. Wild

Bohren von Metall mit Nanosekundenlaser

Forum Photonics BW – Präzisionsbohren mit Kurzpulslasern, Stuttgart

2002

NachhaltigEuropan Campus Rottal-Inn

Vortrag

W. Benecke, M. Mátéfi-Tempfli, T. Reimer, B. Wagner, S. Chemnitz, Oliveira Hansen, R. M. D., Stefan Mátéfi-Tempfli, H.-G. Rubahn

Electromagnetic actuation in MEMS switches

100% CLIMATE NEUTRALITY Conference, Sønderborg, Denmark

DigitalElektrotechnik und Medientechnik

Vortrag

Nicolas Tiefnig, J. Sahu, A. Samiee, László Juhász, M. Wagner, A. Baumgartner

Model-Driven Engineering in Education

18th International Conference on Mechatronics-Mechatronika 2018, Brno, Tschechische Republik

MobilElektrotechnik und Medientechnik

Vortrag

Nicolas Tiefnig, J. Sahu, A. Samiee, László Juhász, M. Wagner

Model-Driven Engineering in Education: Position Control of an Electronic Throttle Valve

5th EcETRAN International Conference for Electronics, Telecommunications, Computers, Automatic Control and Nuclear Engineering, Palić, Serbien

Maschinenbau und Mechatronik

Vortrag

F. Wagner, Hans Helml, Roswitha Giedl-Wagner, M. Wild, A. Pauli

Laser microstructuring of metal – a comparative study

Laser Assisted Net Shape Engineering (LANE) 2004, Erlangen