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Suche nach „[M.] [Wagner]“ hat 12 Publikationen gefunden

Zeitschriftenartikel

de Oliveira Hansen, R. M. D., M. Mátéfi-Tempfli, R. Safonovs, J. Adam, S. Chemnitz, T. Reimer, B. Wagner, W. Benecke, Stefan Mátéfi-Tempfli

Magnetic films for electromagnetic actuation in MEMS switches

Microsystem Technologies, vol. 24, no. 4, pp. 1987-1994

2018

DOI: 10.1007/s00542-017-3595-2

Abstract anzeigen

This paper investigates the fabrication of magnetic films via electroplating to be applied into electromagnetic actuated micro electro-mechanical systems (MEMS) switches. Cobalt and nickel films (1 µm thicknesses) were deposited on gold coated silicon substrates via electrochemical deposition. Different deposition conditions were investigated, regarding temperature and deposition voltage. The films morphologies were characterized via atomic force microscopy, while the magnetic properties of the films were characterized via vibrating sample magnetometer measurements. In order to evaluate the integration of these magnetic films into MEMS switches with low energy consumption, a mathematical model was developed and the results show that these films can be applied into efficient actuation with reduced power dissipation.

Nachhaltig Europan Campus Rottal-Inn

Vortrag

Oliveira Hansen, R. M. D., M. Mátéfi-Tempfli, S. Chemnitz, T. Reimer, B. Wagner, Stefan Mátéfi-Tempfli, W. Benecke, H.-G. Rubahn

Electromagnetic actuation in MEMS switches

100% CLIMATE NEUTRALITY Conference, Sønderborg, Denmark

2015

Maschinenbau und Mechatronik

Beitrag (Sammelband oder Tagungsband)

Giuseppe Bonfigli, M. Kloker, S. Wagner

3-D-boundary-layer transition induced by superposed steady and travelling crossflow vortices

High performance computing in science and engineering '02, [S.l.]

2014

ISBN: 978-3-642-63947-0

Digital Nachhaltig Extern

Beitrag (Sammelband oder Tagungsband)

Anton Schmailzl, T. Amann, M. Glockner, M. Fadanelli, M. Wagner, S. Hierl

Finite element analysis of thermoplastic probes under tensile load using ls-dyna compared to ansys workbench 14 in correlation to experimental investigations

Elektronischer Tagungsband ANSYS Conference & 30th CADFEM Users' Meeting - ACUM (24.-26.10.2012; Kassel)

2012

Elektrotechnik und Medientechnik IQMA

Vortrag

S. Rogowsky, R. Ostendorf, G. Kaufel, W. Pletschen, J. Wagner, S. Liebich, M. Zimprich, K. Volz, W. Stolz, B. Kunert, Edgar Lodermeier, Heiko Ranzinger, Günther Benstetter