Suche nach „[M.] [Sorger]“ hat 13 Publikationen gefunden

MobilNachhaltigTC Plattling MoMo

Patent

Michael Sternad, R. Janski, K. Schmut, M. Wilkening, K. Karlovsky, M. Sorger, A. Dunst, G. Hirtler

VERFAHREN ZUM HERSTELLEN EINER BATTERIE, BATTERIE UND INTEGRIERTE SCHALTUNG.

2017

MobilNachhaltigTC Plattling MoMo

Patent

K. Karlovsky, A. Dunst, G. Hirtler, R. Janski, K. Schmut, M. Sorger, Michael Sternad, M. Wilkening

METHOD OF MANUFACTURING A BATTERY, BATTERY AND INTEGRATED CIRCUIT

2017

MobilNachhaltigTC Plattling MoMo

Zeitschriftenartikel

R. Janski, M. Fugger, M. Forster, M. Sorger, A. Dunst, I. Hanzu, Michael Sternad, M. Wilkening

Lithium barrier materials for on-chip Si-based microbatteries

Journal of Materials Science: Materials in Electronics, vol. 28, no. 19, pp. 14605-14614

2017

DOI: 10.1007/s10854-017-7325-4

Abstract anzeigen

The integration of lithium-ion batteries, featuring ultra-high discharge rates, directly into silicon-based semiconductor devices opens unique paths towards the development of new mobile micro-electronics applications. Nevertheless, the small and mobile lithium ions have to be confined within the battery area of the silicon chip, otherwise the nearby fine microelectronics devices will be irreversibly damaged. Hence, a barrier material that blocks Li+ transport from the active components of the battery into the surrounding crystalline Si is needed. Here we evaluated the capability of magnetron sputtered barrier films of nitrides and alloys of refractory metals to prevent lithium ion diffusion and, thus, the formation of Li–Si phases outside the battery area. In order to determine the Li profiles in the barrier layer and in the silicon substrate, time-of-flight secondary ion mass spectroscopy was applied for profiling the first microns. In combination with electrochemical testing it turned out that titanium nitride as well as tantalum nitride barriers are able to significantly block Li ion migration.

MobilNachhaltigTC Plattling MoMo

Patent

Michael Sternad, M. Forster, K. Schmut, B. Goller, Zieger G., M. Sorger, et al.

LITHIUM BATTERY, METHOD FOR MANUFACTURING A LITHIUM BATTERY, INTEGRATED CIRCUIT AND METHOD OF MANUFACTURING AN INTEGRATED CIRCUIT

2015

MobilNachhaltigTC Plattling MoMo

Patent

Michael Sternad, M. Forster, K. Schmut, B. Goller, Zieger G., B. Sorger, et al.

LITHIUM BATTERY, METHOD FOR MANUFACTURING A LITHIUM BATTERY, INTEGRATED CIRCUIT AND METHOD OF MANUFACTURING AN INTEGRATED CIRCUIT

2014

MobilNachhaltigTC Plattling MoMo

Patent

Michael Sternad, J. Hirschler, M. Forster, M. Sorger, K. Schmut, B. Goller, et al.

BATTERY ELECTRODE, BATTERY, AND METHOD FOR MANUFACTURING A BATTERY ELECTRODE.

2014

MobilNachhaltigTC Plattling MoMo

Patent

Michael Sternad, M. Forster, K. Schmut, B. Goller, Zieger G., M. Sorger, et al.

LITHIUM BATTERY, METHOD FOR MANUFACTURING A LITHIUM BATTERY, INTEGRATED CIRCUIT AND METHOD OF MANUFACTURING AN INTEGRATED CIRCUIT

2014

MobilNachhaltigTC Plattling MoMo

Patent

Michael Sternad, M. Forster, K. Schmut, B. Goller, Zieger G., M. Sorger, et al.

LITHIUM BATTERY, METHOD FOR MANUFACTURING A LITHIUM BATTERY, INTEGRATED CIRCUIT AND METHOD OF MANUFACTURING AN INTEGRATED CIRCUIT

2014

MobilNachhaltigTC Plattling MoMo

Patent

J. Hirschler, M. Forster, M. Sorger, K. Schmut, B. Goller, P. Schweizer, et al.

BATTERY ELECTRODE, BATTERY, AND METHOD FOR MANUFACTURING A BATTERY ELECTRODE

2014

MobilNachhaltigTC Plattling MoMo

Patent

M. Forster, B. Goller, J. Hirschler, K. Schmut, P. Schweizer, M. Sorger, et al.

BATTERY ELECTRODE, BATTERY, AND METHOD FOR MANUFACTURING A BATTERY ELECTRODE

2014

MobilNachhaltigTC Plattling MoMo

Patent

Michael Sternad, M. Forster, K. Schmut, B. Goller, Zieger G., M. Sorger, P. Schweizer

LITHIUM BATTERY, METHOD FOR MANUFACTURING A LITHIUM BATTERY, INTEGRATED CIRCUIT AND METHOD OF MANUFACTURING AN INTEGRATED CIRCUIT

2013

MobilNachhaltigTC Plattling MoMo

Patent

Michael Sternad, M. Forster, K. Schmut, B. Goller, Zieger G., M. Sorger, et al.

LITHIUM BATTERY, METHOD FOR MANUFACTURING A LITHIUM BATTERY, INTEGRATED CIRCUIT AND METHOD OF MANUFACTURING AN INTEGRATED CIRCUIT

2013

MobilNachhaltigTC Plattling MoMo

Vortrag

M. Forster, Michael Sternad, K. Schmut, B. Goller, P. Schweizer, M. Sorger

Theorie vs Praxis - Ist gewünscht gleich machbar?

IIR Konferenz: Elektrochemische Speichersysteme, Wien, Österreich

2011