Publikationen
Suche nach „[M.] [Nafría]“ hat 17 Publikationen gefunden
Suchergebnis als PDFVortrag
Tobias Berthold, Günther Benstetter, Werner Frammelsberger, Manuel Bogner, R. Rodríguez, M. Nafría
Protective nanometer films for reliable Cu-Cu connections
Invited Talk
IEEE International Reliability Physics Symposium (IRPS), San Francisco, CA, USA
Beitrag (Sammelband oder Tagungsband)
Tobias Berthold, Günther Benstetter, Werner Frammelsberger, Manuel Bogner, R. Rodríguez, M. Nafría
Protective nanometer films for reliable Cu-Cu connections
Best Paper Award
Proceedings of the 28th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis (ESREF) [25-28 September, 2017; Bordeaux, Frankreich]
Zeitschriftenartikel
Tobias Berthold, Günther Benstetter, Werner Frammelsberger, R. Rodríguez, M. Nafría
Numerical Study of Hydrodynamic Forces for AFM Operations in Liquid Scanning (Article ID 6286595, 12 pages)
Scanning, no. Article ID 6286595, pp. 1-12
Zeitschriftenartikel
Tobias Berthold, Günther Benstetter, Werner Frammelsberger, Manuel Bogner, R. Rodríguez, M. Nafría
Protective nanometer films for reliable Cu-Cu connections
Microelectronics Reliability, vol. 76-77, no. September, pp. 383-389
Zeitschriftenartikel
Tobias Berthold, Günther Benstetter, Werner Frammelsberger, R. Rodríguez, M. Nafría
Nanoscale characterization of CH3-terminated Self-Assembled Monolayer on copper by advanced scanning probe microscopy techniques
Applied Surface Science, vol. 356, pp. 921-926
DOI: 10.1016/j.apsusc.2015.08.182
Zeitschriftenartikel
Tobias Berthold, Günther Benstetter, Werner Frammelsberger, R. Rodríguez, M. Nafría
Nanoscale characterization of copper oxide films by Kelvin Probe Force Microscopy
Thin Solid Films, vol. 584, no. June 2015, pp. 310-315
DOI: 10.1016/j.tsf.2015.01.071
Vortrag
Tobias Berthold, Günther Benstetter, Werner Frammelsberger, R. Rodríguez, M. Nafría, Raimund Förg
Analysis of copper oxide films by combined scanning microscopy
6th International Conference on Technological Advances of Thin Films & Surface Coatings (THINFILMS2012), Singapur, Singapur
Vortrag
Tobias Berthold, Günther Benstetter, Werner Frammelsberger, R. Rodríguez, M. Nafría
Characterization of Self-Assembled Monolayers on Copper by Scanning Probe Microscopy
16th International Conference on Thin Films (ICTF16), Dubrovnik, Kroatien
Vortrag
Tobias Berthold, Günther Benstetter, Werner Frammelsberger, R. Rodríguez, M. Nafría
Nanoscale copper oxide characterization with Kelvin Probe Force Microscopy
Posterpräsentation
The 7th International Conference on Technological Advances of Thin Films & Surface Coatings (THINFILMS2014), Chongquing, China
Zeitschriftenartikel
V. Iglesias, M. Lanza, K. Zhang, A. Bayerl, M. Porti, M. Nafría, X. Aymerich, Günther Benstetter, Z. Shen, G. Bersuker
Degradation of polycrystalline HfO2 based gate dielectrics under nanoscale electrical stress
Applied Physics Letters, vol. 99
Zeitschriftenartikel
A. Bayerl, M. Lanza, M. Porti, M. Nafría, X. Aymerich, F. Campabadal, Günther Benstetter
Nanoscale and Device Level Gate Conduction Variability of High-k Dielectrics-Based Metal-Oxide-Semiconductor Structures
IEEE Transactions on Device and Materials Reliability, vol. 11, no. September, pp. 495-501
DOI: 10.1109/TDMR.2011.2161087
Zeitschriftenartikel
A. Bayerl, M. Lanza, M. Porti, F. Campabadal, M. Nafría, X. Aymerich, Günther Benstetter
Reliability and gate conduction variability of HfO2-based MOS devices: A combined nanoscale and device level study
Microelectronic Engineering, vol. 88, pp. 1334-1337
Zeitschriftenartikel
M. Lanza, M. Porti, M. Nafría, X. Aymerich, Günther Benstetter, Edgar Lodermeier, Heiko Ranzinger, G. Jaschke, S. Teichert, L. Wilde, P. Michalowski
Conductivity and Charge Trapping After Electrical Stress in Amorphous and Polycrystalline Al2O3-Based Devices Studied With AFM-Related Techniques
IEEE Transactions on Nanotechnology, vol. 10, no. 2, pp. 344-351
Zeitschriftenartikel
M. Lanza, M. Porti, M. Nafría, X. Aymerich, Günther Benstetter, Edgar Lodermeier, Heiko Ranzinger, G. Jaschke, S. Teichert, L. Wilde, P. Michalowski
Crystallization and silicon diffusion nanoscale effects on the electrical properties of Al2O3 based devices
Microelectronic Engineering, vol. 86, no. 7-9, pp. 1921-1924
Vortrag
M. Lanza, M. Porti, M. Nafría, X. Aymerich, Günther Benstetter, et al.
Crystallization and Silicon Diffusion Nanoscale Effects on the Electrical Properties of Al2O3 Based Devices
Conference of Insulating Films on semiconductors (INFOS 2009), Cambridge, Großbritannien
Vortrag
M. Lanza, M. Porti, M. Nafría, Günther Benstetter, Werner Frammelsberger, Heiko Ranzinger, Edgar Lodermeier, G. Jaschke
Influence of the manufacturing process on the electrical properties of thin (< 4 nm) Hafnium based high-k stacks observed with CAFM
18th European Symposium on Reliability of Electronic Devices, Failure Physics and Analysis (ESREF), Arcachon, Frankreich
Zeitschriftenartikel
M. Lanza, M. Porti, M. Nafría, Günther Benstetter, Werner Frammelsberger, Heiko Ranzinger, Edgar Lodermeier, G. Jaschke
Influence of the manufacturing process on the electrical properties of thin (< 4 nm) Hafnium based high-k stacks observed with CAFM
Microelectronics Reliability, vol. 47, no. 9, pp. 1424-1428