NachhaltigF: Angewandte Naturwissenschaften und WirtschaftsingenieurwesenS: TC Teisnach Sensorik
K.-H. Brenner, Maria Kufner, S. Kufner, J. Moisel, A. Müller, S. Sinzinger, M. Testorf, J. Göttert, J. Mohr
Application of three-dimensional micro-optical components formed by lithography, electroforming, and plastic molding
Applied Optics, vol. 3232, no. 92, pp. 6464-6469
Micro-optics is usually associated with planar waveguides or integrated optical circuits. In this case the propagation of light is restricted to one or two dimensions, and the three-dimensional nature of light propagation is disregarded. We present a method of fabricating three-dimensional micro-optical components by the so-called LIGA process, a lithography, electroforming, and plastic molding process in which poly(methyl methacrylate) is structured by high-energy synchrotron radiation. We demonstrate an experimental system of image formation that uses microprisms and microlenses for a three-dimensional microintegration of optical components.