Publikationen
Suche nach „[Igor] [Makarenko]“ hat 3 Publikationen gefunden
Suchergebnis als PDFF: Angewandte Naturwissenschaften und WirtschaftsingenieurwesenF: Maschinenbau und Mechatronik
Zeitschriftenartikel
Use of ELID-grinding on brittle-hard materials
International Journal of Mechatronics and Manufacturing Systems, vol. 4, no. 6, pp. 553-568
2011
DOI: 10.1504/IJMMS.2011.044105
Abstract:
Electrolytic in-process dressing (ELID) is a grinding technology
which enables to manufacture surfaces in a quality that is close to polished on
advanced, brittle-hard materials such as
used in optics. ELID grinding requires
exactly aligned machining pa
rameters of the grinding
process. Sapphire is, due
to its crystal structure, difficult to m
achine. There is a request for thin, i.e.,
below 0.2 mm thickness, sub-surface dama
ge free wafers. To grind sapphire,
the material’s behaviour is to be c
onsidered. Studies on the necessary oxide
layer on the ELID grinding wheel and influe
nces on its build-up process will be
presented. In-feed and grinding velocity are varied and the results on wear,
removal rate and surface quality are shown. The influence of the coolant and
the stiffness of the machine, the grinding forces and pressure are evaluated. The
ELID grinding is compared to conventio
nal grinding. The achieved excellent
surface roughness on sapphire is discussed
F: Angewandte Naturwissenschaften und WirtschaftsingenieurwesenF: Maschinenbau und MechatronikI: Hochschulleitung und -einrichtungen
Beitrag (Sammelband oder Tagungsband)
Igor Makarenko, Christian Vogt, Rolf Rascher, Peter Sperber, Thomas Stirner
ELID supported grinding of thin sapphire wafers
Proceedings of SPIE: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, Volume 7655
2010
F: Angewandte Naturwissenschaften und WirtschaftsingenieurwesenF: Maschinenbau und Mechatronik
Vortrag
ELID supported grinding of thin Sapphire wafers
5th SPIE International Symposium on Advanced Optical Manufacturing and Testing Technologies, Dalian, China
2010