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Suche nach „[H.] [Göbel]“ hat 9 Publikationen gefunden
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    Elektrotechnik und Medientechnik

    Zeitschriftenartikel

    Alexander Hofer, Günther Benstetter, R. Biberger, B. Wilke, H. Göbel

    Scanning probe microscopy based electrical characterization of thin dielectric and organic semiconductor films

    Microelectronics Reliability, vol. 53, no. 9-11, pp. 1430-1433

    2013

    Abstract anzeigen

    Scanning probe microscopy (SPM) techniques offer various characterization methods for thin organic films. However, the majority of the electrical SPM measurements is currently performed in contact mode operation and may lead to severe damage at the surface of soft organic materials. This work shows the electrical characterization of organic insulator and semiconductor films by use of two SPM techniques operating with reduced lateral forces between SPM tip and sample. The first one is intermittent-contact scanning-capacitance-microscopy (IC-SCM) which is used for the detection of the local surface capacitance. The second one is torsional resonance tunneling-atomic-force-microscopy (TR-TUNA) which shows the local conductivity respectively relative film thickness of the sample. It is found that the tunneling current distribution across 50 nm thick organic insulating films is very homogeneous and that inhomogeneities in P3HT and Pentacene films can be pinpointed even if no topographical variations are observable.

    Elektrotechnik und Medientechnik

    Zeitschriftenartikel

    Günther Benstetter, R. Biberger, H. Göbel

    Displacement current sensor for contact and intermittent contact scanning capacitance microscopy

    Microelectronics Reliability, vol. 49, no. 1, pp. 1192-1195

    2009

    Abstract anzeigen

    In this study a displacement current capacitance sensor (DCCS) for scanning capacitance microscopy (SCM) is introduced. It can be used for both intermittent contact (IC) and contact-SCM operation. Based on I/V conversion and subsequent lock-in amplification a displacement current can be detected and used as a measure for dopant concentration. Therefore a periodic variation of the AFM tip substrate capacitance is required. This can be achieved either by a periodic tip oscillation (IC-SCM) or an applied AC voltage between tip and sample (contact-SCM). The advantage of the DCCS is the linearity, which makes it possible to detect absolute dopant concentrations.

    Elektrotechnik und Medientechnik

    Zeitschriftenartikel

    T. Schweinböck, Günther Benstetter, R. Biberger, Peter Breitschopf, H. Göbel

    Intermittent-contact scanning capacitance microscopy versus contact mode SCM applied to 2D dopant profiling

    Microelectronics Reliability, vol. 48 (8-9), pp. 1339-1349

    2008

    Abstract anzeigen

    This study compares two different methods of scanning capacitance microscopy (SCM). The first and approved one operates in contact mode and the second novel one in intermittent-contact (IC) mode. Measurements were performed on several samples and the results are compared. New technical expertises on the novel intermittent-contact method are shown and in conclusion assets and drawbacks of this SCM method are emphasized.

    Elektrotechnik und Medientechnik

    Beitrag (Sammelband oder Tagungsband)

    Günther Benstetter, H. Göbel

    Schnittstellen für schnelle Halbleiterspeicher

    Jahrbuch der Elektrotechnik 1998, Berlin; Offenbach

    1997

    Elektrotechnik und Medientechnik

    Zeitschriftenartikel

    Günther Benstetter, H. Göbel

    Zuverlässigkeitsherausforderungen dünner Dielektrika in Sub-Mikrometer ICs

    F&M Feinwerktechnik Mikrotechnik Mikroelektronik, no. 3, pp. 127-132

    1997

    Elektrotechnik und Medientechnik

    Zeitschriftenartikel

    Günther Benstetter, H. Göbel

    Schnittstellen für schnelle Halbleiterspeicher

    Nachrichtentechnische Zeitschrift (ntz), vol. 49, no. 11, pp. 28-33

    1996

    Elektrotechnik und Medientechnik

    Vortrag

    Alexander Hofer, Günther Benstetter, R. Biberger, B. Wilke, H. Göbel

    Scanning probe microscopy based electrical characterization of thin dielectric and organic semiconductor films

    24th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis (ESREF), Arcachon, Frankreich

    Elektrotechnik und Medientechnik

    Vortrag

    Alexander Hofer, Günther Benstetter, R. Biberger, B. Wilke, H. Göbel

    Capacitance and Conductivity Mapping of Organic Films and Devices with Non-Contact SPM Methods

    International Workshop on Scanning Probe Microscopy for Energy Applications, Mainz

    Elektrotechnik und Medientechnik

    Vortrag

    Alexander Hofer, Günther Benstetter, R. Biberger, H. Göbel

    Intermittent-Contact Scanning Capacitance Analysis of Thin Dielectric Films and Semiconductor Devices

    Invited Talk

    5th International Conference on Technological Advances of Thin Films & Surface Coatings, Harbin, China