Suche nach „[H.] [Göbel]“ hat 9 Publikationen gefunden

Elektrotechnik und Medientechnik

Zeitschriftenartikel

Alexander Hofer, Günther Benstetter, R. Biberger, B. Wilke, H. Göbel

Scanning probe microscopy based electrical characterization of thin dielectric and organic semiconductor films

Microelectronics Reliability, vol. 53, no. 9-11, pp. 1430-1433

2013

Abstract anzeigen

Scanning probe microscopy (SPM) techniques offer various characterization methods for thin organic films. However, the majority of the electrical SPM measurements is currently performed in contact mode operation and may lead to severe damage at the surface of soft organic materials. This work shows the electrical characterization of organic insulator and semiconductor films by use of two SPM techniques operating with reduced lateral forces between SPM tip and sample. The first one is intermittent-contact scanning-capacitance-microscopy (IC-SCM) which is used for the detection of the local surface capacitance. The second one is torsional resonance tunneling-atomic-force-microscopy (TR-TUNA) which shows the local conductivity respectively relative film thickness of the sample. It is found that the tunneling current distribution across 50 nm thick organic insulating films is very homogeneous and that inhomogeneities in P3HT and Pentacene films can be pinpointed even if no topographical variations are observable.

Elektrotechnik und Medientechnik

Zeitschriftenartikel

Günther Benstetter, R. Biberger, H. Göbel

Displacement current sensor for contact and intermittent contact scanning capacitance microscopy

Microelectronics Reliability, vol. 49, no. 1, pp. 1192-1195

2009

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In this study a displacement current capacitance sensor (DCCS) for scanning capacitance microscopy (SCM) is introduced. It can be used for both intermittent contact (IC) and contact-SCM operation. Based on I/V conversion and subsequent lock-in amplification a displacement current can be detected and used as a measure for dopant concentration. Therefore a periodic variation of the AFM tip substrate capacitance is required. This can be achieved either by a periodic tip oscillation (IC-SCM) or an applied AC voltage between tip and sample (contact-SCM). The advantage of the DCCS is the linearity, which makes it possible to detect absolute dopant concentrations.

Elektrotechnik und Medientechnik

Zeitschriftenartikel

T. Schweinböck, Günther Benstetter, R. Biberger, Peter Breitschopf, H. Göbel

Intermittent-contact scanning capacitance microscopy versus contact mode SCM applied to 2D dopant profiling

Microelectronics Reliability, vol. 48 (8-9), pp. 1339-1349

2008

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This study compares two different methods of scanning capacitance microscopy (SCM). The first and approved one operates in contact mode and the second novel one in intermittent-contact (IC) mode. Measurements were performed on several samples and the results are compared. New technical expertises on the novel intermittent-contact method are shown and in conclusion assets and drawbacks of this SCM method are emphasized.

Elektrotechnik und Medientechnik

Beitrag (Sammelband oder Tagungsband)

Günther Benstetter, H. Göbel

Schnittstellen für schnelle Halbleiterspeicher

Jahrbuch der Elektrotechnik 1998, Berlin; Offenbach

1997

Elektrotechnik und Medientechnik

Zeitschriftenartikel

Günther Benstetter, H. Göbel

Zuverlässigkeitsherausforderungen dünner Dielektrika in Sub-Mikrometer ICs

F&M Feinwerktechnik Mikrotechnik Mikroelektronik, no. 3, pp. 127-132

1997

Elektrotechnik und Medientechnik

Zeitschriftenartikel

Günther Benstetter, H. Göbel

Schnittstellen für schnelle Halbleiterspeicher

Nachrichtentechnische Zeitschrift (ntz), vol. 49, no. 11, pp. 28-33

1996

Elektrotechnik und Medientechnik

Vortrag

Alexander Hofer, Günther Benstetter, R. Biberger, B. Wilke, H. Göbel

Scanning probe microscopy based electrical characterization of thin dielectric and organic semiconductor films

24th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis (ESREF), Arcachon, Frankreich

Elektrotechnik und Medientechnik

Vortrag

Alexander Hofer, Günther Benstetter, R. Biberger, B. Wilke, H. Göbel

Capacitance and Conductivity Mapping of Organic Films and Devices with Non-Contact SPM Methods

International Workshop on Scanning Probe Microscopy for Energy Applications, Mainz

Elektrotechnik und Medientechnik

Vortrag

Alexander Hofer, Günther Benstetter, R. Biberger, H. Göbel

Intermittent-Contact Scanning Capacitance Analysis of Thin Dielectric Films and Semiconductor Devices

Invited Talk

5th International Conference on Technological Advances of Thin Films & Surface Coatings, Harbin, China