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Closed-loop laser polishing using in-process surface finish metrology
Applied Optics, vol. 57, no. 4, pp. 834-838
This paper lays out the trail onto a closed-loop polishing process of optical elements enabling the application of the optimum polishing time needed. To that aim, an in-process testing method for monitoring an inclusive micro surface quality (e.g., comprising surface roughness and scratch-and-dig) within the polishing spot is analyzed and its applicability to closed-loop polishing for classical loose-abrasive full-aperture polishing as well as for computer controlled laser polishing is experimentally tested and verified. This enables the determination of the optimum local dwell time resulting in a stable and cost optimized polishing.