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    NachhaltigAngewandte Naturwissenschaften und Wirtschaftsingenieurwesen

    Beitrag (Sammelband oder Tagungsband)

    A. Harsch, C. Pruss, Alexander Haberl, W. Osten

    Tilted wave interferometry for testing large surfaces

    Proceedings of SPIE 10829 (Fifth European Seminar on Precision Optics Manufacturing [April 10-11, 2018; Teisnach])

    2018

    ISBN: 978-1-5106-2270-8

    DOI: 10.1117/12.2318573

    Abstract anzeigen

    Measuring large surfaces interferometrically is a straight forward established technology, as long as they are concave and spherical. The situation chnages completely if aspheres and freeforms have to be measured. The application of a Tilted Wave Interferometer opens up possibilities to measure large concave surfaces of any shape without compensation optics. For the investigation of large convex aspheres, it is necessary to make use of stitching methods. Due to the freeform capability of the Tilted Wave Interefrometer, it is possible to acquire larger subapertures compared to null interferometers. Therefore measurement and computation time are reduced.